Application

Solid-state Thin-film Battery Deposition System




  • Vacuum System for All-Solid-State-Battery R&D
  • Solid-state Thin-film Battery Deposition System
  • Cathode Process – Sputter
  • Electrolyte Process – Sputter
  • Anode Process – Thermal Evaporator
  • Passivation/Encapsulation Process – ALD