Semiconductor R&D

• Glovebox Systems for Lithography

[Specification]
• Used for R&D activities for Optical Sensor
• Applying laminar flow system to maintain ultra-high cleanliness
• Integrations of 4” ALD & Thermal Evaporation System
• H/W & S/W Vibration Isolation technology

• Integration of Photolithography with the glovebox system
• H/W & S/W Vibration Isolation technology
• Avoiding contact of sample with the atmosphere
• Active Vibration Isolation Table
• Applying technology to minimize pump vibration transmission
• Bellows with special materials