Solid-state Thin-film Battery Deposition System

• Vacuum System for All-Solid-State-Battery Research

• ① Cathode Material Deposition Module – Sputter (Sources: LiCoO₂ , LiMn₂O₄ , LiFePO₄ , etc.)
• ② Electrolyte Module – Sputter (Sources: LiPON, LLZO, etc.)
• ③ Anode Material Deposition Module – Thermal Evaporator (Source: Lithium)
• ④ Passivation/Encapsulation – Atomic Layer Deposition (Sources: Al₂O₃ , SiO₂ , HfO₂ , AIN, Si₃N₄ , etc.)