Product

E-Beam System
Single chamber Sliding Door Type


    KBSD 100 – 7C6P(4P)



  • E-Beam System ( Single chamber Sliding Door Type )

    Kiyon offers customized E-Beam Evaporator system integrated with its in-house designed Glovebox provides suitable for various applications.



    [Specification]

    Process Chamber Dimension

    450(W) * 450(D) * 550(H)

    Sample Size

    Piece to Max 100mm * 100mm Glass

    E-Beam Power Capacity

    6 KW

    E-Beam Gun

    7cc x 6 Pockets
    Chamber Ultimate Pressure

    Below than 5.0 x 10-7 Torr

    Chamber Working Pressure

    Below than 5.0 x 10-6 Torr within 30 Minutes

    Film Thickness Uniformity

    <+/-5% within 100mm * 100mm Glass

    Front Door for Sample Loading & Source Refill In Glovebox Condition
    Rear Side Door for Chamber Maintenance & Cleaning (Without Destroying The Condition of The Glovebox)
    System Fully Automation Control by PC Control Available
    System Semiauto Control & Manual Control by PLC Based Touch Control (10.5“ Touch Panel) : Auto Pumping, Auto Venting, Auto System Shut Down
    Auto Deposition Control & Co-deposition Process Available
    Sample Heating (Up to 300 ℃) / Cooling ( Down to 5 ℃ ) Available

  • > Please Kiyon`s local customer center for more details